Laser Machines and Systems
Excimer Beam Delivery Optics
Superior quality optics matched to the unique combination of high pulse energy, short UV wavelengths, and high power.
Many applications for excimer lasers need delivery optics – for projecting, homogenizing, and/or attenuating the beam. Coherent uses an unmatched combination of experience and technical knowledge to create optomechanical tools for this challenge.
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Excimer Beam Delivery Optics - Overview
Simplify your excimer laser application with standard and custom beam delivery optics and optomechanical modules.
Product Specifications
Product Type |
Key Features |
Attenuators |
Variable attenuator includes compensator plate to eliminate beam walk-off |
Homogenizers |
Generates 5x5 mm or 10x10 mm uniform field with <± 5% variation |
Projection Lenses |
5X or variable 4-10X demagnification with higher values on request |
