Laser Machines and Systems
VarioLas
Systems based on the powerful COMPex excimer laser are flexible tools for high quality UV microprocessing with a line beam or a square beam field shape.
Superior optical design, rugged mechanics, and an excimer laser with unmatched pulse-to-pulse stability deliver precision results. Applications include Laser Lift-Off (LLO) Separation, Dopant Ion Activation, Ablative Patterning, and Thin Film Annealing.
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VarioLas – Some Key Performance Metrics
Get precise ablation or material modification results with the high (up to 7.5 J/cm2) energy density and 100 Hz pulse repetition frequency of VarioLas.
Product Specifications
Parameter |
VarioLas Eco |
VarioLas Pro |
VarioLas Sweep |
Field Shape |
Square |
Square |
Line |
Field Size (mm2) |
2 x 2 |
2 x 2 |
50 x 0.6 |
Optical Resolution (µm) |
30 |
5 |
– |
